An Introduction to Surface-Micromachining

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An Introduction to Surface-Micromachining

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An Introduction to Surface-Micromachining

An Introduction to Surface-Micromachining

  • Brand: Unbranded
Price: $209.00
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$209.00
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Description

An Introduction to Surface-Micromachining

1. Introduction. - 1. 1 Why miniaturize?. - 1. 2 Why surface-micromachining?. - 1. 3 History. - References. - I Fabrication. - 2. Microfabrication Processes. - 3. Micromachining Technologies. - II Design. - 4. Microscale Physics. - 5. Mechanics. - 6. Design Rules. - 7. Non-Ideal Processes. - 8. Design Techniques. - III Devices. - 9. Electrical Components. - 10. Mechanical Components. - 11. Electrostatic Actuators. - 12. Electro-Thermal-Compliant Actuators. - 13. Raised Structures. - IV Processes. - 14. PolyMUMPsTM Process. - 15. SUMMiTTM Process. - 16. MUSiC Process. Language: English
  • Brand: Unbranded
  • Category: Education
  • Artist: Robert W. Johnstone
  • Format: Paperback
  • Language: English
  • Publication Date: 2012/12/12
  • Publisher / Label: Springer
  • Number of Pages: 189
  • Fruugo ID: 450894515-950605315
  • ISBN: 9781475710779

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